Dangerous Chemicals in the Semiconductor
Chip Industry
Chemicals of Concern in the Semiconductor Industry
Ethylene Glycol Ethers (EGE)
Are a group of organic solvents widely used in the microchip
industry especially in Photoresist. Their reproductive toxcity
has been well documented in animal studies. A human study of
1,150 semiconductor manufacturing workers 561 female employees
and 589 wifes of male employees showed increased risks of spontaneous
abortions, miscarriages and subfertility.
Fabrication of semiconductor chips and integrated circuits involves
a series of chemical processes such as photolithography, patterning,
etching, junction formation, oxidation, layer deposition and
metallization. EGE and their acetates, used as components of
photoresist- a photo sensitive material used to coat the wafer
during patterning. Wafer fabrication is done in clean room environments
where air is circulated through high speed filters to remove
particles that can settle on the wafer and interfere with the
circuit formation. However, this filtration process does not
remove gases or vapors from the room and may enhance exposure.
Acetone
Inhalation of moderate to high levels causes nose, throat, lung,
and eye irritation; confusion; and possibly coma. Ingestion of
very high levels causes unconsciousness and damage to the skin
in the mouth. Long-term exposure in animals causes kidney, liver,
and nerve damage; increased birth defects; and lowered ability
to reproduce in males
Arsenic
At low levels causes nausea, vomiting, diarrhea, decreased
production of red and white blood cells, abnormal heart rhythm,
and blood vessel damage.
At high levels over 60 parts per million causes tissue damage
(nerves, stomach, intestine, skin) and may be fatal. Chronic
exposure causes lung cancer and it is a known human carcinogen.
Arsine
Causes headache; malaise; weakness; dizziness; dyspnea; abdominal
and back pain; nausea; vomiting; jaundice; peripheral neuropathy;
and damage to the blood, kidneys, and liver.
Benzene
Causes damage to bone marrow and decreased production of red
blood cells leading to anemia, excessive bleeding, immune system
effects, increased chance of infection, reproductive effects,
and leukemia Benzene is a known human carcinogen.
Cadmium
Causes lung damage, renal dysfunction, hepatic injury, bone defects,
hypertension, reproductive toxicity, and teratogenicity. Reasonably
anticipated to be a human carcinogen
Hydrochloric Acid
Highly corrosive, Causes severe eye and skin burns and conjunctivitis; prolonged or repeated skin contact may cause dermatitis. Inhalation causes severe respiratory irritation with coughing, burns, breathing difficulty, and possible coma. Ingestion causes digestive tract irritation, abdominal pain, vomiting, and possible death. Also causes photosensitization in certain individuals and circulatory system failure
Lead
Damages kidneys and the immune system. Causes premature birth; low birth weight; decreased mental ability; learning deficits in children; decreased reaction time; weakness in fingers, wrists, and ankles; anemia; memory effects; spontaneous abortion; and damage to the male reproductive system
Methyl Chloroform
Causes headache; CNS depression; poor equilibrium; eye, nose, throat, and skin irritation; and cardiac arrhythmia
Toluene
Long-term exposure to low to moderate levels causes tiredness, confusion, weakness, memory loss, nausea, and hearing loss. Inhalation of high levels over a short period of time can cause permanent damage to the brain and speech, vision and hearing problems, loss of muscle control, and poor balance. Causes neurological problems and retarded growth in children. Reasonably anticipated to be a human carcinogen
Trichloroethylene
Irritates the eyes and respiratory tract. Inhalation causes dizziness, sleepiness, and headache. Chronic exposure causes speech and hearing impairment, kidney disease, blood disorders, stroke, anemia, diabetes, and skin rashes. Probable human carcinogen.
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